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3D Effects At 20nm And Beyond Topography as a result of attenuated phase shift masks at 20nm and below requires taking 3D effects into account.
Ho-Sung Kang, Rémy Willinger, Baye M. Diaw, Bryan Chinn, Validation of a 3D Anatomic Human Head Model and Replication of Head Impact in Motorcycle Accident by Finite Element Modeling, SAE Transactions ...
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